Innovating science for over 130 years
Yamato PR Series Standard Gas Plasma Asher
PR200 / PR300-115V PR300-220V / PR301-115V PR301-220V
Description
Standard barrel type low temperature ashing devices suitable for a wide range of application such as ashing , etching and dry cleaning
Features
- Isotropy barrel type
- Compact, space saving design
- Capable of removing coated organic matter
- Adjustable RF suitable for various applications
- Outstanding operability and safety
- Can be set for a wide range of output conditions to handle a variety of testing samples
Application
- Functionalization of the polymeric material surface improves adhesion
- Oxidation reaction generates functional groups -OH, >C=O, -COOH on the surface (very small amount of water and carbon dioxide will impact)
- In nitrogen plasma, a nitrogen atom is incorporated onto the surface, generates a functional group -NH₂ Resist peeling
- Surface modification of materials (metals, polymers, films, ceramics, etc.)
- Asbestos pre-processing (ashing of membrane filter)
- Low-temperature ashing (polymer material, coal, food, etc.) PDMS chips bonding to glass and PDMS substrate
- Production of semiconductors and analysis work
| Model | PR200 | PR300-115V PR300-220V | PR301-115V PR301-220V |
|---|---|---|---|
| Plasma mode | Direct plasma (DP) | ||
| High frequency output | Max. 200W | Max. 300W (100W x 3 chambers) | Max. 300W |
| Oscillation frequency | 13.56MHz | ||
| Tuning method | Auto matching | Manual biaxial | |
| Reaction chamber (pyrex glass) | ø100×160mm x 1 chamber | ø64×160mm × 3 chambers | ø118×160mm x 1 chamber |
| Reaction gas | 1 system (oxygen), flow meter control with dry air purge gas | ||
| Control system | Manual leak valve | Auto pressure reduction, auto leak valve | |
| Piping material | Stainless steel, Teflon | Stainless steel, Teflon, Copper and Brass | Stainless steel, Teflon |
| External dimensions W×D×H | 350x400x500 mm | 438×520×556 mm | 438×520×660 mm |
| Weight | ~25kg | ~36kg | ~34kg |
| Power source 50/60Hz | AC115V 13A | AC115V 6.1A AC220V 3.2A |
|
| Optional accessories | Sample dish, vacuum pump | Sample dish, stand, shelf, vacuum pump | |
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To download Operational Manual, visit our Technical Support Center
40 years as a leading scientific lab equipment provider in the United States.
All products come with a 1 year warranty.
Every product is made through environmentally conscious methods and remains eco-friendly all throughout its life cycle.
