Innovating science for over 130 years
Yamato PDC610 Multi Stage Gas Plasma Dry Cleaner
PDC610
Description
High performance compact multi-stage plasma cleaner
Features
- Maximum power of 600W with compact package
- Electrodes can be switched from 1-stage, 2-stages, and 3-stages
- Supports processing of a vertical magazine
- RIE/DP modes selectable
- Supports integrated data logger (optional)
- Matching point memory function (optional)
- Complies with FCC standards
Applications
- Improvement of adhesiveness of various materials and surface reformation
- Light ashing and light etching process
- Pre-treatment of implemented board bonding, plastic package and print board plating
- Processing of LED related commercial products
- Cleaning of electronic parts
- Resist peeling or residue removal after wetting process
- Cleaning of accuracy parts including optics and optical fibers, or machine parts
- Reformation of resin surface including fluoro resin
| Model | PDC610 |
|---|---|
| Plasma mode | RIE/DP selectable |
| Electrode structure | 3-stage independent parallel flat plates |
| Vacuum gauge | Capacitance manometer |
| High frequency output | Max 600W |
| Oscillation frequency | 13.56MHz Quartz oscillator |
| Output setting method | Manual setting on the LCD touch panel |
| Matching method | Auto tuning |
| Control device | Sequencer |
| Display | LCD touch panel |
| Chamber size WxDxH | 350 x 270 x 300 mm |
| Stage size | W250 x D220mm Three stages |
| Chamber material | Aluminum |
| Reactive gas | 2 systems (Argon and Oxygen) |
| Purge gas | Nitrogen or dry air |
| Vacuum pump | Rotary vacuum pump (Approx. 345 L/min) |
| External dimension WxDxH | 600 x 722 x 700 mm |
| Exterior material | Stainless steel |
| Power source 50/60 Hz | 3-phase AC200V~AC230V 15A (vacuum pump included) |
| Standards | FCC |
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To download Operational Manual, visit our Technical Support Center
40 years as a leading scientific lab equipment provider in the United States.
All products come with a 1 year warranty.
Every product is made through environmentally conscious methods and remains eco-friendly all throughout its life cycle.
