Innovating science for over 130 years
Yamato PD Series Single Stage Gas Plasma Dry Cleaners
PDC200/210/510
Description
High performance single stage, compact plasma cleaner suitable for R&D purposes
Features
- Simple and compact plasma surface treatment device
- RIE (Reactive Ion Etching) Plasma mode, with DP (Direct Plasma) mode as option
- Excellent electrode structure for plasma uniformity
- Simple touch panel system
Applications
- Plasma processing of CSP, BGA, COB substratum
- Removal of organic films and metal oxidized films
- Dry cleaning of printed circuit board
- Surfactant process LED assembly
- For R&D
| Model | PDC200 | PDC210 | PDC510 |
|---|---|---|---|
| Plasma mode | RIE (DP mode option) | RIE / DP selectable | |
| Electrode structure | Parallel flat stage plate | ||
| Vacuum gauge | Capacitance manometer | ||
| High frequency output | Max 300W | Max 500W | |
| Oscillation frequency | 13.56MHz Quartz oscillator | ||
| Output setting method | Manual setting on the LCD touch panel | ||
| Matching method | Auto tuning | ||
| Controller | Programmable | ||
| Display | LCD touch panel | ||
| Chamber size | W400 × D250 × H150 mm | W500 × D300 × H200 mm | |
| Stage size | W250 × D170 mm | W410 × D210 mm | |
| Chamber material | Aluminum | ||
| Reaction gas | 2 systems (Argon, Oxygen) | ||
| Purge gas | Nitrogen or dry air | ||
| Reaction gas flow control | Flow meter | Mass flow controller | |
| Rotary vacuum pump (optional) | ~345 l/min | ~500 l/min | |
| External dimensions WxDxH | 540×600×600 mm | 540×600×600 mm | 700×700×700 mm |
| Weight | ~100kg | ~105kg | ~180kg |
| Power source 50/60Hz | Single phase AC100V 15A | 3-phase AC200V~AC240V | |
Click on the links below to download the associated PDFs.
To download Operational Manual, visit our Technical Support Center
40 years as a leading scientific lab equipment provider in the United States.
All products come with a 1 year warranty.
Every product is made through environmentally conscious methods and remains eco-friendly all throughout its life cycle.
