Innovating science for over 130 years

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Yamato PR Series Compact Gas Plasma Asher

PR500-115V  PR500-220V / PR510


Compact, barrel type low temperature ashing device designed with a large chamber made of quartz considered almost completely resistant against most plasma processes


  • Compact, space saving design with oscillation section integrated with a portion of the chamber
  • Outstanding operability and safety with the automatic tuning system as standand component
  • Equipped with a large quartz chamber (ø215mm) which can process big testing sampless


  • Removal of photoresist
  • Cleaning of parts
  • Surfactant treatment
  • Micro polishing
  • Corresponds to wafer and glass substrate
(Flow meter)
(Mass flow meter)
MethodBarrel type chamber direct plasma
High frequency outputMax. 500W
Oscillating frequency13.56MHz
Tuning methodAutomatic tuning
Reaction chamberMade of quartz, ø215×305mm
Reaction gasDual system (O₂ / CF₄)
Control systemManualAutomatic touch panel
Piping materialStainless steel, Teflon
External dimensions W×D×H438×520×760 mm520×630×760 mm
Power source 50/60HzAC115V 7.8A
AC220V 4.1A
AC220V 7.3A
Standard accessoriesConnection table (1 complete set), vacuum grease (1 pc.), o-ring for reaction chamber (1 pc.)
Optional accessoriesFrame for wafers (2, 3, 4, 5, 6 inches), multi-purpose angled frame, aluminum etching tunnel, stand

Click on the links below to download the associated PDFs.

PR500/510 Catalog

To download Operational Manual, visit our Technical Support Center

36 years as a leading scientific lab equipment provider in the United States.
All products come with a 1 year warranty.
Every product is made through environmentally conscious methods and remains eco-friendly all throughout its life cycle.